Fatikow, S.  1960- <br/><br/>
Microsystem technology and microrobotics :  with 277 figures / 
Sergej Fatikow, Ulrich Rembold. 
 - xii, 408 pages :  illustrations ;  24 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9783540606581 3540606580 
<br/><br/><label>LCCN: </label>96053992  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electromechanical devices--Design and construction.<br/>Microrobots.<br/>Microfabrication<br/>Robotics.
<br/><br/><label>Dewey Class. No.: </label>621  / SER