TY  - BOOK
AU  - Fatikow,S.
AU  - Rembold,Ulrich
TI  - Microsystem technology and microrobotics: with 277 figures 
SN  - 9783540606581
U1  - 621 23
PY  - 1997///
CY  - Berlin
PB  - Springer
KW  - Electromechanical devices
KW  - Design and construction
KW  - Microrobots
KW  - Microfabrication
KW  - Robotics
N1  - Includes bibliographical references and index
ER  -