| 000 | 01304cam a2200349 i 4500 | ||
|---|---|---|---|
| 001 | 4947068 | ||
| 003 | OSt | ||
| 005 | 20221226141810.0 | ||
| 008 | 961223s1997 gw a b 001 0 eng | ||
| 010 | _a 96053992 | ||
| 020 |
_a9783540606581 _qhardcover (alk. paper) |
||
| 020 |
_a3540606580 _qhardcover (alk. paper) |
||
| 040 |
_aDLC _cDLC _dDLC _dUOC _beng _erda |
||
| 082 | 0 | 0 |
_a621 _223 _bSER |
| 100 | 1 |
_aFatikow, S. _q(Sergej), _d1960- _93987 _eauthor. |
|
| 245 | 1 | 0 |
_aMicrosystem technology and microrobotics : _bwith 277 figures / _cSergej Fatikow, Ulrich Rembold. |
| 264 | 1 |
_aBerlin : _bSpringer, _c1997. |
|
| 264 | 4 | _c© Springer-Verlag 1997. | |
| 300 |
_axii, 408 pages : _billustrations ; _c24 cm. |
||
| 336 |
_2rdacontent _atext _btxt |
||
| 337 |
_2rdamedia _aunmediated _bn |
||
| 338 |
_2rdacarrier _avolume _bnc |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aElectromechanical devices _xDesign and construction. _91633 |
|
| 650 | 0 |
_aMicrorobots. _93989 |
|
| 650 | 0 |
_aMicrofabrication _93988 |
|
| 650 | 0 |
_aRobotics. _92525 |
|
| 700 | 1 |
_aRembold, Ulrich _93990 _eauthor. |
|
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
||
| 942 |
_2ddc _cBK |
||
| 999 |
_c1475 _d1475 |
||