Fatikow, S. 1960-
Microsystem technology and microrobotics : with 277 figures / Sergej Fatikow, Ulrich Rembold. - xii, 408 pages : illustrations ; 24 cm.
Includes bibliographical references and index.
9783540606581 3540606580
96053992
Electromechanical devices--Design and construction.
Microrobots.
Microfabrication
Robotics.
621 / SER
Microsystem technology and microrobotics : with 277 figures / Sergej Fatikow, Ulrich Rembold. - xii, 408 pages : illustrations ; 24 cm.
Includes bibliographical references and index.
9783540606581 3540606580
96053992
Electromechanical devices--Design and construction.
Microrobots.
Microfabrication
Robotics.
621 / SER